dc.contributor.author | Dictus, Dries | |
dc.contributor.author | Dordi, Y. | |
dc.contributor.author | Gurer, E. | |
dc.contributor.author | Krishtab, Mikhail | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Carbonell, Laure | |
dc.contributor.author | van der Veen, Marleen | |
dc.contributor.author | El-Mekki, Zaid | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-10-21T07:20:27Z | |
dc.date.available | 2021-10-21T07:20:27Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22269 | |
dc.source | IIOimport | |
dc.title | Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Dictus, Dries | |
dc.contributor.imecauthor | Krishtab, Mikhail | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.imecauthor | El-Mekki, Zaid | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Dictus, Dries::0000-0002-7896-1747 | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 261 | |
dc.source.endpage | 262 | |
dc.source.conference | Materials for Advanced Metallization - MAM | |
dc.source.conferencedate | 11/03/2013 | |
dc.source.conferencelocation | Leuven Belgium | |
imec.availability | Published - open access | |
imec.internalnotes | MD6 | |