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Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy
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Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy
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Date
2013
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Chintala, Ravi Chandra
;
Mannarino, Manuel
;
Nazir, Aftab
;
Schulze, Andreas
;
Vandervorst, Wilfried
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1903
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Acq. date: 2026-01-10
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Views
1903
since deposited on 2021-10-21
4
last month
3
last week
Acq. date: 2026-01-10
Citations