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Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy

dc.contributor.authorEyben, Pierre
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorMannarino, Manuel
dc.contributor.authorNazir, Aftab
dc.contributor.authorSchulze, Andreas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T07:33:17Z
dc.date.available2021-10-21T07:33:17Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22327
dc.sourceIIOimport
dc.titleCombining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorNazir, Aftab
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceForum des Microscopies a Sonde Locale
dc.source.conferencedate25/03/2013
dc.source.conferencelocationSpa Belgique
imec.availabilityPublished - imec


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