Fundamental aspects of Arn+ SIMS profiling of common organic semiconductors

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Authors
Fleischmann, Claudia; Conard, Thierry; Havelund, R.; Franquet, Alexis; Poleunis, C.; Voroshazi, Eszter; Delcorte, A.; Vandervorst, Wilfried
Conference
19th International Conference on Secondary Ion Mass Spectrometry
Title
Fundamental aspects of Arn+ SIMS profiling of common organic semiconductors
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Meeting abstract
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