Publication:

HAXPES study of full high-k/metal gate stacks deposited on Ge substrates

Date

2013
Meeting abstract
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Author(s)

Fleischmann, Claudia  
;
Kalpyris, Ioannis
;
Conard, Thierry  
;
Adelmann, Christoph  
;
Sioncke, Sonja
;
Rueff, J.P.
;
Ablett, J.M.
;
Vandervorst, Wilfried  

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Abstract

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1857 since deposited on 2021-10-21
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