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Composition measurements of thin films beyond the spatial resolution of SIMS

dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelmotte, Joris
dc.contributor.authorMerckling, Clement
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T07:43:16Z
dc.date.available2021-10-21T07:43:16Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22368
dc.sourceIIOimport
dc.titleComposition measurements of thin films beyond the spatial resolution of SIMS
dc.typeMeeting abstract
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewyes
dc.source.conference19th International Conference on Secondary Ion Mass Spectrometry - SIMS19
dc.source.conferencedate29/09/2013
dc.source.conferencelocationJeju South Korea
imec.availabilityPublished - imec


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