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Manufacturing challenges of directed self-assembly

dc.contributor.authorGronheid, Roel
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorYounkin, Todd
dc.contributor.authorChan, BT
dc.contributor.authorVan Look, Lieve
dc.contributor.authorPollentier, Ivan
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-21T08:01:45Z
dc.date.available2021-10-21T08:01:45Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22435
dc.sourceIIOimport
dc.titleManufacturing challenges of directed self-assembly
dc.typeMeeting abstract
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.source.peerreviewno
dc.source.beginpage44
dc.source.conferenceAVS 60th International Symposium & Exhibition
dc.source.conferencedate27/10/2013
dc.source.conferencelocationLong Beach, CA USA
dc.identifier.urlhttp://www2.avs.org/symposium/avs60/pdfs/abstractbook.pdf
imec.availabilityPublished - imec


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