Rectification of EUV-patterned contact holes using directed self-assembly

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Authors
Gronheid, Roel; Singh, Arjun; Younkin, Todd; Rincon Delgadillo, Paulina; Nealey, Paul; Chan, BT; Nafus, Kathleen; Romo Negreira, Ainhoa; Somervell, Mark
Conference
Advances in Resist Materials and Processing Technology XXX
Title
Rectification of EUV-patterned contact holes using directed self-assembly
Publication type
Proceedings paper
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