Publication:

Rectification of EUV-patterned contact holes using directed self-assembly

Date

2013

Proceedings Paper

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Author(s)

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Rincon Delgadillo, Paulina

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Nafus, Kathleen

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Romo Negreira, Ainhoa

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Somervell, Mark

Statistics

1868 since deposited on 2021-10-21

Acq. date: 2026-09-14