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GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

dc.contributor.authorHalder, Sandip
dc.contributor.authorStiers, Karen
dc.contributor.authorKandaswamy, Prem Kumar
dc.contributor.authorRosmeulen, Maarten
dc.contributor.authorCarbonell, Laure
dc.contributor.authorSaripalli, Yoga
dc.contributor.authorOsman, Haris
dc.contributor.authorRosseel, Erik
dc.contributor.authorMani, Antonio
dc.contributor.authorHu, Qiona
dc.contributor.authorVedula, Srinivas
dc.contributor.authorPolli, Marco
dc.date.accessioned2021-10-21T08:06:21Z
dc.date.available2021-10-21T08:06:21Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22452
dc.sourceIIOimport
dc.titleGaN-on-Si process defect detection and analysis for HB-LEDs and power devices
dc.typeProceedings paper
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorStiers, Karen
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorMani, Antonio
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage371
dc.source.endpage374
dc.source.conference24th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC
dc.source.conferencedate13/05/2013
dc.source.conferencelocationSaratoga Springs, NY USA
imec.availabilityPublished - open access


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