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Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes
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Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes
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Date
2013
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Han, Jeong Hwan
;
Lee, Sang Woon
;
Choi, Byung Joon
;
Eom, Taeyong
;
Kim, Seong Keun
;
Song, Seul Ji
;
Lee, Woongkyu
;
Hwang, cheol seong
Journal
Coordination Chemistry Reviews
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1834
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-12
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Metrics
Views
1834
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-12
Citations