Authors

Han, Jeong Hwan; Lee, Sang Woon; Choi, Byung Joon; Eom, Taeyong; Kim, Seong Keun; Song, Seul Ji; Lee, Woongkyu; Hwang, cheol seong

ISSN

0010-8545

Issue

23_24

Journal

Coordination Chemistry Reviews

Volume

257

Title

Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes

Publication type

Journal article