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Mass-detection based in-plane resonant nano-electro-mechanical sensors

dc.contributor.authorHassani, Faezeh Arab
dc.contributor.authorDupre, Cecilia
dc.contributor.authorOllier, Eric
dc.contributor.authorCobianu, Cornel
dc.contributor.authorArmini, Silvia
dc.contributor.authorCherman, Vladimir
dc.contributor.authorIonescu, Adrian Mihai
dc.contributor.authorTsuchiya, Yoshishige
dc.contributor.authorMizuta, Hiroshi
dc.date.accessioned2021-10-21T08:09:07Z
dc.date.available2021-10-21T08:09:07Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22462
dc.sourceIIOimport
dc.titleMass-detection based in-plane resonant nano-electro-mechanical sensors
dc.typeOral presentation
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.conferenceJapan Society of Applied Physics (JSAP) Annual Meeting
dc.source.conferencedate27/03/2013
dc.source.conferencelocationKanagawa Japan
imec.availabilityPublished - imec


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