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Energy distribution of positive charges in gate dielectric: probing technique and impacts of different defects
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Authors
Hatta, S. W. M.
;
Ji, J.
;
Zhang, J. F.
;
Duan, M.
;
Zhang, W. D.
;
Soin, N.
;
Kaczer, Ben
;
De Gendt, Stefan
;
Groeseneken, Guido
ISSN
0018-9383
Issue
5
Journal
IEEE Transactions on Electron Devices
Volume
60
Title
Energy distribution of positive charges in gate dielectric: probing technique and impacts of different defects
Publication type
Journal article
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