Publication:
Line edge roughness measurement technique of fingerprint in block copolymer thin film
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1884 since deposited on 2021-10-21
5last month
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Acq. date: 2026-08-06
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Statistics
Views
1884 since deposited on 2021-10-21
5last month
1last week
Acq. date: 2026-08-06
Citations