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Line edge roughness measurement technique of fingerprint in block copolymer thin film

dc.contributor.authorIsawa, Miki
dc.contributor.authorSakai, Kei
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorGronheid, Roel
dc.contributor.authorYoshida, Hiroshi
dc.date.accessioned2021-10-21T08:27:51Z
dc.date.available2021-10-21T08:27:51Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22527
dc.sourceIIOimport
dc.titleLine edge roughness measurement technique of fingerprint in block copolymer thin film
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage868114
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXVII
dc.source.conferencedate25/02/2013
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1678005
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 8681


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