Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Integration and manufacturing aspects of moving from HT-10.10 to ZoneBOND™ in temporary wafer bonding and debonding for 3D applications
View/
open
27099.pdf (956.5Kb)
Metadata
Show full item record
Authors
Jourdain, Anne
;
Phommahaxay, Alain
;
Verbinnen, Greet
;
Murdoch, Gayle
;
Miller, Andy
;
Rebibis, Kenneth June
;
Guerrero, Alice
;
McCutcheon, Jeremy
;
Privett, Mark
;
Neidrich, Jason
;
Beyer, Gerald
;
Beyne, Eric
Conference
IEEE 63rd Electronic Components and Technology Conference - ECTC
Title
Integration and manufacturing aspects of moving from HT-10.10 to ZoneBOND™ in temporary wafer bonding and debonding for 3D applications
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login