Authors

Jourdan, Nicolas; Barbarin, Yohan; Croes, Kristof; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt; Vancoille, Eric

ISSN

2162-8726

Issue

3

Journal

ECS Solid State Letters

Volume

2

Title

Plasma enhanced chemical vapor deposition of manganese on low-k dielectrics for copper diffusion barrier application

Publication type

Journal article