Publication:

Effect of TSV presence on FEOL yield and reliability

Date

2013
Proceedings Paper
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Author(s)

Kauerauf, Thomas
;
Branka, Anna
;
Croes, Kristof  
;
Redolfi, Augusto  
;
Civale, Yann
;
Torregiani, Cristina
;
Groeseneken, Guido  
;
Beyne, Eric  

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