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Effect of TSV presence on FEOL yield and reliability

dc.contributor.authorKauerauf, Thomas
dc.contributor.authorBranka, Anna
dc.contributor.authorCroes, Kristof
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorCivale, Yann
dc.contributor.authorTorregiani, Cristina
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-21T08:41:15Z
dc.date.available2021-10-21T08:41:15Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22570
dc.sourceIIOimport
dc.titleEffect of TSV presence on FEOL yield and reliability
dc.typeProceedings paper
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage5C.6
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate14/04/2013
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access


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