Publication:

Integration of wet cleaning in 45 nm pitch BEOL processing

Date

2013

Meeting abstract

Simple item page Full metadata Statistics

Files

27224.pdf 91.49 KB

Author(s)

;

;

Lazzarino, Frederic

;

Decoster, Stefan

;

;

Holsteyns, Frank

;

De Gendt, Stefan

Statistics

1896 since deposited on 2021-10-21

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Acq. date: 2026-02-25