Publication:
Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
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2439 since deposited on 2021-10-21
Acq. date: 2026-06-15
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Statistics
Views
2439 since deposited on 2021-10-21
Acq. date: 2026-06-15
Citations