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Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)

dc.contributor.authorKim, Min-Soo
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorFernandez, Luis
dc.contributor.authorDevriendt, Katia
dc.contributor.authorLee, Jae Woo
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorMertens, Sofie
dc.contributor.authorBurke, Ed
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-21T08:51:21Z
dc.date.available2021-10-21T08:51:21Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22600
dc.sourceIIOimport
dc.titleBulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
dc.typeProceedings paper
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage706
dc.source.endpage707
dc.source.conferenceExtended Abstracts of the International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate24/09/2013
dc.source.conferencelocationFukuoka Japan
imec.availabilityPublished - open access


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