Authors

Kim, Min-Soo; Vandeweyer, Tom; Altamirano Sanchez, Efrain; Dekkers, Harold; Van Besien, Els; Tsvetanova, Diana; Richard, Olivier; Chew, Soon Aik; Boccardi, Guillaume; Horiguchi, Naoto

Conference

14th International Conference on Ultimate Integration in Silicon - ULIS

Title

Self-aligned double patterning of 1x nm FinFETs; a new device integration through the challenging geometry

Publication type

Proceedings paper

Embargo date

9999-12-31