Request a copy of the file
Enter the following information to request a copy for the following item: Self-aligned double patterning of 1x nm FinFETs; a new device integration through the challenging geometry
Requesting the following file: 26453.pdf
Enter the following information to request a copy for the following item: Self-aligned double patterning of 1x nm FinFETs; a new device integration through the challenging geometry
Requesting the following file: 26453.pdf