Authors

Li, Yunlong; Wu, Chen; Degraeve, Robin; Croes, Kristof; Barbarin, Yohan; Baklanov, Mikhaïl; Tokei, Zsolt

Conference

IEEE International Reliability Physics Symposium - IRPS

Title

Trap spectroscopy and Ta penetration induced charge trapping in Porous SiOCH low-k dielectrics

Publication type

Proceedings paper

Embargo date

9999-12-31