Tensile strained GeSn on Si by solid phase epitaxy for high mobility FET devices

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Authors
Lieten, Ruben; Jevasuwan, Wipakorn; Uchida, Nori; Hattori, H.; Seo, Jin Won; Locquet, Jean-Pierre; Maeda, Tatsuro
Conference
E-MRS Spring Meeting
Title
Tensile strained GeSn on Si by solid phase epitaxy for high mobility FET devices
Publication type
Oral presentation
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