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High-k gadolinium and aluminum scandates for hybrid floating gate NAND flash

dc.contributor.authorLisoni, Judit
dc.contributor.authorBreuil, Laurent
dc.contributor.authorNyns, Laura
dc.contributor.authorBlomme, Pieter
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-21T09:27:52Z
dc.date.available2021-10-21T09:27:52Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22707
dc.sourceIIOimport
dc.titleHigh-k gadolinium and aluminum scandates for hybrid floating gate NAND flash
dc.typeMeeting abstract
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.beginpage96
dc.source.endpage97
dc.source.conference18th Conference of Insulting Films on Semiconductors - INFOS: Book of Abstracts
dc.source.conferencedate25/06/2013
dc.source.conferencelocationCracow Poland
imec.availabilityPublished - imec


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