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Measurement, modelling and simulation of defects in as-grown Czrochalski silicon
Publication:
Measurement, modelling and simulation of defects in as-grown Czrochalski silicon
Date
1997
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Senkader, S.
;
Kissinger, G.
;
Higgs, V.
;
Trauwaert, Marie-Astrid
;
Graef, D.
;
Lambert, U.
;
Wagner, Patrick
Journal
Journal of Crystal Growth
Abstract
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1994
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1994
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations