Publication:

Epitaxial growth challenges for advanced CMOS devices

Date

2013

Proceedings Paper

Simple item page Full metadata Statistics

Files

26236.pdf 254.84 KB

Author(s)

;

Hikavyy, Andriy

;

Vincent, Benjamin

;

Witters, Liesbeth

;

;

;

Rooyackers, Rita

;

Vandooren, Anne

;

Vandervorst, Wilfried

;

Statistics

1811 since deposited on 2021-10-21

3last month

3last week

Acq. date: 2026-08-08