Backscattering/channeling study of high dose rare-earth implants in Si

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Authors
Vantomme, Andre; Wu, Ming Fang; Wahl, U.; Pattyn, Hugo; Bender, Hugo; Langouche, G.
Conference
International Conference on Ion Beam Analysis - IBA; July 1997; Lisboa, Portugal.
Title
Backscattering/channeling study of high dose rare-earth implants in Si
Publication type
Oral presentation
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