Manufacturing challenges of GaN-on-Si HEMTs in a 200 mm CMOS fab

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Authors

Marcon, Denis; De Jaeger, Brice; Halder, Sandip; Vranckx, Nick; Mannaert, Geert; Van Hove, Marleen; Decoutere, Stefaan

ISSN

0894-6507

Issue

3

Journal

IEEE Transactions on Semiconductor Manufacturing

Volume

26

Title

Manufacturing challenges of GaN-on-Si HEMTs in a 200 mm CMOS fab

Publication type

Journal article

Embargo date

9999-12-31

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