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Evaluation of backside passivation using laser annealing in backside illuminated image sensors
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Authors
Minoglou, Kiki
;
De Munck, Koen
;
Malachowski, Karl
;
Sabuncuoglu Tezcan, Deniz
;
Everaert, Jean-Luc
;
Haspeslagh, Luc
;
Mazzamuto, Fulvio
;
Toqué-Trésonne, Ines
;
Huet, Karim
;
De Moor, Piet
Conference
Workshop CMOS Image Sensors for High Performance Applications
Title
Evaluation of backside passivation using laser annealing in backside illuminated image sensors
Publication type
Oral presentation
Embargo date
9999-12-31
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