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Evaluation of backside passivation using laser annealing in backside illuminated image sensors

dc.contributor.authorMinoglou, Kiki
dc.contributor.authorDe Munck, Koen
dc.contributor.authorMalachowski, Karl
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorMazzamuto, Fulvio
dc.contributor.authorToqué-Trésonne, Ines
dc.contributor.authorHuet, Karim
dc.contributor.authorDe Moor, Piet
dc.date.accessioned2021-10-21T10:05:59Z
dc.date.available2021-10-21T10:05:59Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22809
dc.sourceIIOimport
dc.titleEvaluation of backside passivation using laser annealing in backside illuminated image sensors
dc.typeOral presentation
dc.contributor.imecauthorDe Munck, Koen
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceWorkshop CMOS Image Sensors for High Performance Applications
dc.source.conferencedate26/11/2013
dc.source.conferencelocationToulouse France
imec.availabilityPublished - open access


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