Authors

Moras, Miquel; Martin-Martinez, Javier; Rodriguez, Rosanna; Nafria, Montse; Aymerich, Xavier; Simoen, Eddy

Conference

International Semiconductor Device Research Symposium - ISDRS

Title

Negative bias temperature instability in devices with millisecond annealed ultra-shallow junctions

Publication type

Proceedings paper

Embargo date

9999-12-31