Authors

Murugesan Kuppuswamy, Vijaya-Kumar; Constantoudis, Vassilios; Gogolides, Evangelos; Vaglio Pret, Alessandro; Gronheid, Roel

ISSN

1537-1646

Issue

2

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

12

Title

Critical dimension uniformity and contact edge roughness in extreme ultraviolet lithography: effect of photoacid generator, sensitizer and quencher

Publication type

Journal article