Publication:

Simulation of Cu pumping during TSV fabrication

Date

2013

Proceedings Paper

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Author(s)

Nabiollahi, Nabi

;

;

De Messemaeker, Joke

;

Gonzalez, Mario

;

;

;

De Wolf, Ingrid

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1939 since deposited on 2021-10-21

Acq. date: 2026-02-25