Authors

Nabiollahi, Nabi; Wilson, Chris; De Messemaeker, Joke; Gonzalez, Mario; Croes, Kristof; Beyne, Eric; De Wolf, Ingrid

Conference

IEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE

Title

Simulation of Cu pumping during TSV fabrication

Publication type

Proceedings paper