Publication:

Back-channel-etch process flow for a-IGZO TFTs

Date

2013
Proceedings Paper
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Author(s)

Nag, Manoj  
;
Steudel, Soeren
;
Vaisman Chasin, Adrian  
;
Myny, Kris  
;
Rockele, Maarten
;
Bhoolokam, Ajay
;
Willegems, Myriam  
;
Smout, Steve  
;
Vicca, Peter
;
Ameys, Marc  
;
Schols, Sarah  
;
Genoe, Jan  
;
Groeseneken, Guido  
;
Heremans, Paul  

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2016 since deposited on 2021-10-21
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Acq. date: 2026-01-11

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