Publication:

Advanced dielectrics targeting 2X DRAM MIM capacitors

Date

2013

Proceedings Paper

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Files

27638.pdf 526.48 KB

Author(s)

Popovici, Mihaela Ioana

;

;

Aoulaiche, Marc

;

Redolfi, Augusto

;

;

;

Douhard, Bastien

;

Delabie, Annelies

;

;

;

Van Elshocht, Sven

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