Advanced dielectrics targeting 2X DRAM MIM capacitors

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Authors
Popovici, Mihaela Ioana; Swerts, Johan; Aoulaiche, Marc; Redolfi, Augusto; Kaczer, Ben; Kim, Min-Soo; Douhard, Bastien; Delabie, Annelies; Clima, Sergiu; Jurczak, Gosia; Van Elshocht, Sven
Conference
Atomic Layer Deposition Applications 9
Title
Advanced dielectrics targeting 2X DRAM MIM capacitors
Publication type
Proceedings paper
Embargo date
9999-12-31
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