Show simple item record

Advanced dielectrics targeting 2X DRAM MIM capacitors

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorKaczer, Ben
dc.contributor.authorKim, Min-Soo
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelabie, Annelies
dc.contributor.authorClima, Sergiu
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-21T11:03:33Z
dc.date.available2021-10-21T11:03:33Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22949
dc.sourceIIOimport
dc.titleAdvanced dielectrics targeting 2X DRAM MIM capacitors
dc.typeProceedings paper
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage143
dc.source.endpage152
dc.source.conferenceAtomic Layer Deposition Applications 9
dc.source.conferencedate27/10/2013
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://ecst.ecsdl.org/content/58/10/143.full.pdf+html?sid=8e4810f2-6b37-45b2-9e27-35b064120d2e
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol.58, Issue 10


Files in this item

Thumbnail
Name:
27638.pdf
Size:
526.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record