Authors

Put, Brecht; Adelmann, Christoph; Swerts, Johan; Rooyackers, Rita; Tielens, Hilde; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana

ISSN

2162-8726

Issue

1

Journal

ECS Solid State Letters

Volume

2

Title

CMOS-compatible dielectric constant engineering by embedding metallic particles in aluminum oxide

Publication type

Journal article

Embargo date

9999-12-31