Reliability comparison of ISSG oxide and HTO as tunnel dielectric in 3-D–SONOS applications

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Authors

Qiao, Fengying; Arreghini, Antonio; Blomme, Pieter; Date, Lucien; Van den Bosch, Geert; Liyang, Pan; Jun, Xu; Van Houdt, Jan

ISSN

0741-3106

Issue

5

Journal

IEEE Electron Device Letters

Volume

34

Title

Reliability comparison of ISSG oxide and HTO as tunnel dielectric in 3-D–SONOS applications

Publication type

Journal article

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