Authors

Rampelberg, Geert; Devloo-Casier, Kilian; Deduytsche, Davy; Schaekers, Marc; Blasco, Nicolas; Detavernier, Christophe

ISSN

0003-6951

Issue

11

Journal

Applied Physics Letters

Volume

102

Title

Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers

Publication type

Journal article

Embargo date

9999-12-31