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A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret

dc.contributor.authorRenaud, Michael
dc.contributor.authorAltena, Geert
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorMatova, Svetla
dc.contributor.authorNaito, Y.
dc.contributor.authorYamakawa, T.
dc.contributor.authorTakeuchi, H.
dc.contributor.authorOnishi, K.
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-21T11:22:46Z
dc.date.available2021-10-21T11:22:46Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22993
dc.sourceIIOimport
dc.titleA high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
dc.typeProceedings paper
dc.contributor.imecauthorde Nooijer, Christine
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage693
dc.source.endpage696
dc.source.conferenceTransducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate16/06/2013
dc.source.conferencelocationShanghai China
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6626861&queryText%3DA+HIGH+PERFORMANCE+ELECTROSTATIC+MEMS+VIBRATI
imec.availabilityPublished - open access


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