Authors

Rincon Delgadillo, Paulina; Craig, Gordon; Gronheid, Roel; Nealey, Paul

ISSN

0914-9244

Issue

6

Journal

Journal of Photopolymer Science and Technology

Volume

26

Title

Scale-up of a chemo-epitaxy flow for feature multiplication using directed self-assembly of block-copolymers

Publication type

Journal article

Embargo date

9999-12-31