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Origin of defect in directed self-assembly of block copolymers using feature multiplication

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorHarukawa, Ryoto
dc.contributor.authorParnell, Doni
dc.contributor.authorLee, Yu-tsung
dc.contributor.authorChan, BT
dc.contributor.authorLin, Guanyang
dc.contributor.authorCao, Yi
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorSomervell, Mark
dc.contributor.authorNafus, Kathleen
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-21T11:25:01Z
dc.date.available2021-10-21T11:25:01Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22998
dc.sourceIIOimport
dc.titleOrigin of defect in directed self-assembly of block copolymers using feature multiplication
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conferenceIEEE Litho Workshop
dc.source.conferencedate11/11/2013
dc.source.conferencelocationLa Quinta USA
imec.availabilityPublished - imec


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