Authors

Rochus, Veronique; Ramezani, Maliheh; Cosemans, Stefan; Witvrouw, Ann; De Meyer, Kristin; Tilmans, Harrie; Rottenberg, Xavier

Conference

IEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE

Title

Design of SiGe nano-electromechanical relays for logic applications

Publication type

Proceedings paper

Embargo date

9999-12-31