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Design of SiGe nano-electromechanical relays for logic applications

dc.contributor.authorRochus, Veronique
dc.contributor.authorRamezani, Maliheh
dc.contributor.authorCosemans, Stefan
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-21T11:27:45Z
dc.date.available2021-10-21T11:27:45Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23004
dc.sourceIIOimport
dc.titleDesign of SiGe nano-electromechanical relays for logic applications
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorCosemans, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceIEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE
dc.source.conferencedate15/04/2013
dc.source.conferencelocationWroclaw Poland
imec.availabilityPublished - open access


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