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Molecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applications

dc.contributor.authorRodriguez, Leonard
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorSutens, Ben
dc.contributor.authorWinroth, Gustaf
dc.contributor.authorDelabie, Annelies
dc.contributor.authorGronheid, Roel
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-21T11:28:12Z
dc.date.available2021-10-21T11:28:12Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23005
dc.sourceIIOimport
dc.titleMolecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applications
dc.typeMeeting abstract
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.beginpage53
dc.source.conferenceAVS 60th International Symposium & Exhibition
dc.source.conferencedate27/10/2013
dc.source.conferencelocationLong Beach, CA USA
dc.identifier.urlhttp://www2.avs.org/symposium/avs60/pdfs/abstractbook.pdf
imec.availabilityPublished - imec


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