An improved technology for elevated source/drain MOSFETS

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Authors
Waite, Andrew Michael; Howard, Dave; Kubicek, Stefan; Caymax, Matty; De Meyer, Kristin; Evans, A. G. R.
Conference
ESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference
Title
An improved technology for elevated source/drain MOSFETS
Publication type
Proceedings paper
Embargo date
9999-12-31
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