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Ni(Pt) silicide with improved thermal stability for application in DRAM PERI or RMG devices
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Authors
Schram, Tom
;
Spessot, Alessio
;
Ritzenthaler, Romain
;
Rosseel, Erik
;
Caillat, Christian
;
Horiguchi, Naoto
;
Fazan, Pierre
Conference
Materials for Advanced Metallization - MAM
Title
Ni(Pt) silicide with improved thermal stability for application in DRAM PERI or RMG devices
Publication type
Meeting abstract
Embargo date
9999-12-31
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