Low-frequency-noise-based oxide trap profiling in replacement high-k/metal-gate pMOSFETs

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Authors
Simoen, Eddy; Lee, Jae Woo; Veloso, Anabela; Paraschiv, Vasile; Horiguchi, Naoto; Claeys, Cor
Conference
224th ECS Fall Meeting: Symposium on ULSI Process Integration
Title
Low-frequency-noise-based oxide trap profiling in replacement high-k/metal-gate pMOSFETs
Publication type
Meeting abstract
Embargo date
9999-12-31
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